TSMC and Samsung Commit to ASML's $400M High NA EUV Machines to Power Next-Gen AI Chips

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TSMC and Samsung have committed to deploying ASML's High NA extreme ultraviolet lithography machines for advanced chips and DRAM manufacturing starting 2028-2030. The chipmakers joined a new industry initiative to transition from 6-inch to 12-inch photomask technology by 2033, promising 40% productivity gains and enabling production of AI's largest processors.

TSMC and Samsung Commit to High NA EUV Technology

TSMC and Samsung, the world's two largest chipmakers, have committed to using ASML's High NA extreme ultraviolet lithography machines as demand surges for more advanced chips used in AI applications

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. Samsung plans to deploy High NA EUV in 2028 for DRAM manufacturing, while TSMC expects to adopt the technology in 2030 for advanced chips at cutting-edge nodes

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. TSMC stated that use of High NA machines would rise "driven primarily by the increasingly complex transistor architectures required for AI applications"

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. These commitments mark a significant expansion in the deployment of ASML's newest chipmaking tools, which cost approximately $400 million per unit

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The Technology Behind High NA EUV Machines

ASML's High NA EUV lithography machines represent the next major platform in next-generation semiconductor manufacturing, capable of printing smaller and more intricate circuit patterns onto silicon wafers compared to current EUV tools

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. The semiconductor equipment manufacturer's machines use anamorphic optics to resolve finer features, enabling chipmakers to build denser designs at advanced nodes

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. However, this improved resolution comes with a trade-off: High NA systems expose roughly half the area of older generation tools in one pass

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. Intel is already using High NA EUV technology for advanced chip manufacturing, having purchased the systems early and shipped laptop processors made with the technology

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Source: TechSpot

Source: TechSpot

Industry Initiative for 12-Inch Photomask Technology

TSMC and Samsung have joined ASML in an industry initiative to advance 12-inch photomask technology, upgrading from the current 6-inch format that the semiconductor industry has relied on for decades

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. Photomasks are the patterned stencils used to transfer circuit designs onto silicon wafers during chip production

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. The larger mask format would allow High NA machines to handle chips as large as the biggest data center devices made with existing EUV equipment, including processors measuring up to 800 square millimeters designed by Nvidia and Google

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. ASML plans to show a pilot line using the larger masks in 2031 and have the technology ready for high-volume production by 2033

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Productivity Gains and Cost Reduction

The transition to 12-inch photomask technology promises substantial improvements in fab productivity and chipmaking costs. Marco Pieters, ASML's Chief Technology Officer, stated: "If we're going to pull it off as an industry, then you'll actually see that the productivity of those systems will go up by 40%"

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. The larger format is expected to remove stitching constraints that currently add complexity and cost to chip production

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. With current High NA systems, a die measuring 800 square millimeters would require stitching together from two exposures through a single exposure process, a technique that costs throughput and introduces seams where yield problems tend to occur

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. The bigger mask removes the need for stitching, enabling advanced chip manufacturers to fully leverage High NA EUV advantages

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Samsung's Memory Manufacturing Strategy

Samsung announced it will introduce High NA EUV into future DRAM high-volume manufacturing for the first time in the industry by 2028

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. The company stated that High NA EUV is expected to extend the DRAM scaling roadmap, with improved resolution enabling process simplification and increased efficiency

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. Young Hyun Jun, Vice Chairman and CEO of Samsung Electronics, emphasized: "The AI era is transforming the semiconductor industry and increasing the importance of technological innovation across the entire value chain"

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. SK Hynix is also considering whether to join the consortium working on 12-inch masks, targeting 2028 for High NA EUV processes in mass production of DRAM chips

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Source: Korea Times

Source: Korea Times

Market Implications and Future Outlook

Investors view the success of High NA EUV machines as critical to ASML's future growth, particularly as the stock seeks to extend a 120% run over the last year

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. Barclays analysts noted in a report that the announcements "should provide more visibility on adoption which has been a key debate," adding that the news is "a positive"

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. ASML has not provided recent forecasts on machine sales but stated it will add about 30% capacity for EUV in total in 2027

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. Barclays analysts suggested that "ASML with a significant decision ahead on whether to further expand EUV capacity than the recently expanded targets it has already given. Demand is clearly strong"

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. The coordinated effort requires collaboration across blank suppliers, pellicle makers, mask writers, inspection and repair tools, and every handling system in a fab—representing a decade of coordinated capital spending across competing companies

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. Christophe Fouquet, ASML's President and CEO, stated: "As the industry enters a new era driven by artificial intelligence, close collaboration with our customers becomes even more important"

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