Samsung and TSMC Commit to ASML's $400 Million High NA EUV Lithography for AI Chip Production

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Samsung Electronics and TSMC have committed to adopting ASML's High NA EUV lithography technology, marking a pivotal shift in next-generation semiconductor manufacturing. Samsung plans to introduce the technology for DRAM production by 2028, while TSMC targets 2030 for advanced chips, as AI-driven demand pushes the industry toward more sophisticated chipmaking tools.

Samsung and TSMC Join Forces with ASML on High NA EUV Lithography

Samsung Electronics and TSMC, the world's two largest chipmakers, have committed to adopting ASML's High NA extreme ultraviolet lithography machines, signaling a major advancement in next-generation semiconductor manufacturing

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. Samsung plans to introduce High NA EUV lithography into DRAM production by 2028, marking the first time in the industry that this technology will be used for high-volume memory manufacturing

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. TSMC expects to deploy the technology for advanced chips by 2030, driven by increasingly complex transistor architectures required for AI applications

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. These commitments follow Intel's earlier adoption, making ASML's $400 million machines the centerpiece of the semiconductor manufacturing roadmap for the AI era

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Source: The Next Web

Source: The Next Web

The Strategic Collaboration Extends Beyond Lithography Machines

The Samsung and ASML partnership goes beyond simply purchasing chipmaking tools. Both Samsung and TSMC have joined an industry initiative to advance 12-inch photomask technology, replacing the 6-inch format that has been the standard for decades

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. This transition addresses a critical limitation of High NA EUV systems: their anamorphic optics expose roughly half the area of older generation machines in one pass

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. Processors designed by Nvidia and Google already reach about 800 square millimeters, sitting at the ceiling of what current tools can print at once

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. With larger masks, High NA systems can expose chips the size of today's biggest data-center processors in a single shot, eliminating the need for stitching multiple exposures together—a technique that costs throughput and introduces yield problems

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. ASML's chief technology officer Marco Pieters told Reuters that if the industry successfully implements 12-inch masks, "the productivity of those systems will go up by 40%"

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Why High NA EUV Matters for AI Chips and DRAM Scaling

High NA EUV lithography enables chipmakers to print smaller and more intricate circuit patterns on silicon wafers, a capability essential as the industry pushes toward finer geometries

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. Like a larger camera lens capturing a sharper image, a higher numerical aperture allows the optical system to collect light from wider angles and produce finer details in the projected pattern

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. For Samsung, High NA EUV is expected to extend the DRAM scaling roadmap, with improved resolution enabling process simplification and increased efficiency

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. Conventional lithography may require multiple exposures to create extremely fine lines, while High NA can achieve the same pattern in a single exposure, simplifying the manufacturing process

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. TSMC emphasized that adoption will rise "driven primarily by the increasingly complex transistor architectures required for AI applications"

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. This positions High NA EUV as critical infrastructure for the next wave of AI chips powering data centers and edge computing.

Timeline and Industry Implications for Chipmaking Tools

The adoption timeline reveals a measured approach to next-generation semiconductor manufacturing. Samsung targets 2028 for High NA EUV in DRAM production, while SK Hynix is also weighing whether to join the consortium while aiming at the same year for High NA DRAM in volume

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. TSMC intends to use High NA EUV in high-volume manufacturing at advanced nodes from 2030, initially on existing 6-inch masks

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. A pilot line for 12-inch masks is planned for 2031, with systems expected to be ready for advanced-node production by 2033

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. Intel has already moved faster, running High NA in production and shipping laptop processors made on it, having bought in early when the tools cost roughly $400 million each

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. Barclays analysts noted that the announcements "should provide more visibility on adoption which has been a key debate," calling the news "a positive" for ASML

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. Investors see broader adoption of High NA EUV as important to ASML's future growth, especially as the stock looks to extend a 120% run over the last year

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The Infrastructure Challenge and Long-Term Bets

Changing mask size is not simply a matter of purchase orders—it requires coordinated infrastructure transformation across the entire semiconductor value chain. A mask standard shift pulls in blank suppliers, pellicle makers, mask writers, inspection and repair tools, and every handling system in a fab, none of which ASML owns

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. This represents a decade of coordinated capital spending across companies that compete with each other, agreed now on the expectation that chips will keep getting bigger

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. Samsung, drawing on its leadership in both memory and foundry manufacturing and its extensive experience with advanced EUV lithography, is positioned to play a critical role in the 12-inch photomask transition

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. The transition is expected to further increase fab productivity, lower chipmaking costs, and remove stitching constraints, enabling advanced chip manufacturers to fully leverage the advantages of High NA EUV

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. ASML has not given a recent forecast on how many machines it expects to sell but has said it will add about 30% capacity for EUV in total in 2027

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. Barclays analysts noted that "demand is clearly strong" and ASML faces "a significant decision ahead on whether to further expand EUV capacity"

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Source: Korea Times

Source: Korea Times

What This Means for the AI Era and Semiconductor Innovation

Young Hyun Jun, Vice Chairman and CEO of Samsung Electronics, stated that "the AI era is transforming the semiconductor industry and increasing the importance of technological innovation across the entire value chain"

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. ASML CEO Christophe Fouquet emphasized that "as the industry enters a new era driven by artificial intelligence, close collaboration with our customers becomes even more important"

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. The commitments from Samsung and TSMC make High NA EUV the default rather than the exception for advanced chips, well before the decade is out

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. For ASML, every High NA system it sells is worth several times a conventional EUV tool, and the company is already trying to build machines faster because AI-driven demand is running ahead of what its factories can produce

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. In a related development, Samsung Electronics co-led a Series D funding round for Mistral AI, a leading European artificial intelligence model developer, with the round raising 3 billion euros and valuing the company at more than 21 billion euros

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. Watch for whether other memory makers like SK Hynix join the consortium, how quickly ASML can scale production capacity, and whether the 2033 timeline for 12-inch mask production holds as AI chip sizes continue to grow.

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