3 Sources
[1]
ASML and SK hynix assemble industry-first 'commercial' High-NA EUV system at fab in South Korea
Initially for R&D use, until later this decade where it will transition to production SK hynix and ASML early on Wednesday announced that they had assembled the industry's first Twinscan NXE:5200B High-NA EUV lithography system at the company's fab M16 in Icheon, South Korea. The device will
[2]
SK hynix claims world's first High NA EUV machine for 'mass production' of cutting edge chips, beating Intel to the punch
A Twinscan EXE:5200B lithography system has been set up in a South Korean fab. Chipmaking is an incredibly complex process that only gets more so to meet the needs of smaller, more intricate chips. It requires lithography machines to print and scale these silicon thinking machines. High Numerical
[3]
SK hynix assembles industry's first High-NA EUV machine for its M16 fab plant in South Korea
TL;DR: SK hynix has deployed the industry's first High-NA EUV lithography machine, the ASML TWINSCAN EXE:5200B, at its M16 fab in South Korea. This advanced system enables 1.7x smaller transistors and 2.9x higher density, boosting chip precision and competitiveness in AI memory production. SK
Share
Copy Link
SK hynix assembles the industry's first commercial High-NA EUV lithography system at its South Korean fab, positioning itself at the forefront of advanced memory chip production for AI and next-generation computing.
In a groundbreaking move, SK hynix has announced the assembly of the industry's first commercial High-NA (Numerical Aperture) EUV (Extreme Ultraviolet) lithography system at its M16 fabrication plant in Icheon, South Korea
1
.
Source: TweakTown
The newly installed system, ASML's TWINSCAN EXE:5200B, represents a significant advancement in lithography technology. With a numerical aperture of 0.55, compared to the previous 0.33, this High-NA EUV system achieves an 8nm resolution, surpassing the 13nm resolution of current Low-NA EUV tools
1
. This improvement enables:2
These capabilities allow chipmakers to simplify lithography steps by avoiding double or triple EUV patterning, albeit with new technical challenges
1
.SK hynix plans to initially use the High-NA EUV system for research and development purposes, focusing on:
1
The company estimates that it will transition to using High-NA EUV tools for mass production in the 2030s
1
. This strategic approach allows SK hynix to gain a critical advantage in R&D, enabling detailed prototyping of DRAM structures at a higher pace than possible with existing Low-NA EUV tools1
.Related Stories
The deployment of this advanced lithography system has several significant implications:
1
.3
.2
.ASML, the manufacturer of the High-NA EUV system, views this development as a critical milestone. Kim Byeong-Chan, ASML's head of customer team, stated, "High-NA EUV is a critical technology that opens the next chapter of the semiconductor industry"
1
.Cha Seon Yong, head of R&D at SK hynix, expressed optimism about the technology's potential: "We expect the addition of the critical infrastructure to bring our technological vision we have been pursuing into reality"
3
.As the semiconductor industry continues to evolve, the successful implementation of High-NA EUV technology by SK hynix marks a significant step forward in chip manufacturing capabilities, potentially reshaping the landscape of AI and high-performance computing in the years to come.
Summarized by
Navi
[1]
08 Sept 2026•Technology
24 Mar 2026•Business and Economy

13 Jan 2026•Business and Economy

1
Technology

2
Policy and Regulation

3
Technology
